Simultaneous IR Material Recognition and Conductivity Mapping by Nanoscale Near-Field Microscopy
A. J. Huber, D. Kazantsev, F. Keilmann, J. Wittborn, and R. Hillenbrand
Advanced Materials 19, p.2209 (2007)
IR scattering-type near-field microscopy is applied to simultaneously map material composition and conduction properties in cross-sectional samples of industrial bipolar and metal-oxide- semiconductor devices with nanoscale spatial resolution. Within a single mid-IR image, all relevant materials such as metals, Si, Si3N4, and oxides can be identified by material-specific amplitude and phase contrasts.